L'accès aux archives de la revue « Annales de l'institut Fourier » (http://annalif.ujf-grenoble.fr/) implique l'accord avec les conditions générales d'utilisation (http://www.numdam.org/conditions). Toute utilisation commerciale ou impression systématique est constitutive d'une infraction pénale. Toute copie ou impression de ce fichier doit contenir la présente mention de copyright. Article numérisé dans le cadre du programme Numérisation de documents anciens mathématiques http://www.numdam.org/
Surface topography is required to the function of many kinds of industrial products, and the number of applications keeps increasing, making the need for adequate control of surfaces and an understanding of surface topography measurements more important than ever. In this paper, we presented a sensitive and cost-effective optical probe for surface topography. The astigmatic method used in the optical probe is optimized for submicron/nanometer resolution and monotonic characterization of focus error signal (FES). A home-made system based on this optical probe was also presented, and the measurement results of surface topography indicate great potential of applications in many industrial fields.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.