Extreme Ultraviolet (EUV) lithography utilizes photons of 91.6 eV energy to ionize resists, generating secondary electrons, thus enabling electron-driven reactions. Unlike photolithography, where photons below 7 eV selectively activate photoactive compounds, photons at 91.6 eV ionize all materials, subsequently generating secondary electrons. The energy and the numbers of secondary electrons generated after ionization are determined by the material chemistry. Several metals are reported to have high secondary electron generation capability and high EUV absorption, therefore metals can be one of the solution to deal with the insufficient photon density in resist. Halogen atoms like iodine and fluorine also provide high absorption which would be suitable alternative sensitizer to the metal salts sensitizer. In this work, we study metal salt sensitizers with different cations and anions as well as halogenated sensitizer in both polymer and PAG. Total electron yields are increased with increased resist absorption for both metal and halogen sensitizer. Sensitivity of resists with metal salt sensitizers increase, resulting in increased LCDU. However, halogenated sensitizers do not show positive correlation between sensitivity and electron yield as metal sensitizer. Through this study, we expect to explore materials that enable both high absorption and high photoelectron generation efficiency at 91.6 eV.
Compliance of distributed ledger technology (DLT) based solutions with the European Union General Data Protection Regulation (EU GDPR) is currently a hot topic both from a technical point of view, as well as from a legal and normative one. Flexible working is a new working model where employees can perform their work activity without specific time and space constraints. In this context privacy and information trustworthiness are relevant and, therefore, on the one hand it can gain benefit from using DLT based solutions, on the other hand it must comply with the GDPR. This paper describes a solution that combines DLTs and the new Ciphertext‐Policy Attribute Based Encryption cryptographic techniques to support compliance with the EU GDPR in the context of flexible working. The devised solution is being concretely experimented, in the context of the EU H2020 CITADEL project, by the Municipality of Bari (Italy).
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