Sn-doped InP wafers were etched by reactive ion beam etching (RIBE) using a gas mixture of N 2 /O 2 at ion energies varying from 100 to 600 eV. We investigated the radiation damage caused by RIBE using various techniques which are sensitive to the near-surface region. The optical and electrical properties of the damaged layer as a function of ion energy were studied by photoluminescence microscopy (PLM), photoluminescence spectroscopy, spectroscopic ellipsometry (SE) and electrochemical capacitance-voltage profiling. The electron channelling pattern technique (ECP) was used to examine the structural disorder. The observed radiation damage was attributed to the formation of phosphorus vacancies indicating preferential loss of phosphorus in the InP. We found optimum etching conditions at an ion energy of 400 eV representing the best trade-off between high etch rate and low radiation damage. The potential of PLM, SE and ECP as fast and non-destructive techniques for quality control in research as well as manufacturing is demonstrated.
This paper summarizes the research and technical achievements done under the EU project GigaWaM. The goal of this project was to develop a cost-effective solution that can meet the increasing bandwidth demands in access networks. The approach was to use a novel wavelength division multiplexing passive optical network (WDM-PON) architecture that can deliver symmetric 1 Gb/s to 64 users over 20 km standard single mode fiber using the L and C bands for down and upstream, respectively. During the course of the project, a number of key enabling technologies were developed including tunable transceivers, athermal 50 GHz spaced arrayed waveguide grating multiplexer devices, novel hybridization technologies for integration of passive and active electro-optic devices, and system-level algorithms that ensure the quality of service. The outcome of the project proved a reliable, cost-effective, flexible, and upgradable WDM-PON solution, achieving per-user datarates of 2.5 and 10 Gb/s for up and downstream, respectively. The proposed solution is not only suitable for access networks, but also for metro aggregation and mobile backhaul.
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