A number of new fabrication techniques are developed and optimized in order to fit the requirements of contemporary superconducting electronics. To achieve ultimate performance of integrated submm receivers with operational frequency of 1 THz, tunnel junctions with AlN tunnel barrier having a value as low as 1 m 2 have been developed. High quality characteristics of Nb/AlN/Nb tunnel junctions with = 16 and = 10 m 2 have been demonstrated. Electron Beam Lithography (EBL) in combination with Chemical Mechanical Polishing (CMP) has been incorporated to produce Nb/AlN/Nb junctions with 0.03 m 2 area. A new approach to get overdamped Nb/AlO /Nb tunnel junction has been proposed and realized. The dependencies of the main parameters of novel junctions on the currents density and circuits geometry have been studied. These junctions may have a good potential in Josephson Junction Arrays and Single-Flux-Quantum applications (RSFQ).
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