Reactive (N+) and nonreactive (Ne+) ions scattered from Pt(111) at an incident energy of 30 eV were detected through an energy analyzer at various scattering angles using a newly developed ion scattering apparatus. The surviving ions of Ne+ are mainly scattered via single collision, while N+ ions are dominantly scattered via double collision. The angular distribution of scattered Ne+ ions shows a broad scattering lobe with the maximum intensity around specular reflection. For N+, on the other hand, the angular distribution around specular reflection is so sharp that it should be considered to be caused by resonancelike scattering, although the maximum of the main broad lobe is shifted to the surface plane compared to the specular direction. The difference between N+ and Ne+ in the scattering process for the survival ions is due to the difference in the interaction potential including the neutralization process.
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