Superconducting transition edge bolometers on micromachined silicon membranes have been fabricated. The optical response is 580 V/W at a time constant of 0.4 ms. The detectivity D* is 3.8×109 (cm Hz1/2 W−1) at a temperature of 84.5 K and within the frequency regime 100<f<300 Hz. This is one of the fastest composite type bolometers ever reported. Upon thermal optimization, this type of detector should be competitive with state-of-the-art quantum detectors.
The bolometric performance of a high-Tc transition edge bolometer has been evaluated within the temperature range 80 K<T<300 K. The detectivity D* of the device is peaking at transition midpoint and remains at moderate levels up to room temperature. The bolometric time constant of the device increases from 0.33 ms at transition midpoint to 1.55 ms at ambient temperature. The noise pattern displays 1/f behavior at low frequency and is scaling with bias current and the thermal resistance coefficient β of the superconducting film.
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