The growth process, optical and structural properties of a-Si:H films deposited from a silane multipole dc discharge are analyzed by real time and spectroscopic ellipsometry, and ir absorption spectroscopy. Films deposited mainly from neutral polymerized species are systematically compared to films deposited from monomeric ionic species at various ion incident energy up to 100-eV. An increase of ion bombardment energy is shown to favor the formation of high density homogeneous and isotropic films.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.