Articles you may be interested inThe origins of pressure-induced phase transformations during the surface texturing of silicon using femtosecond laser irradiation J. Appl. Phys. 112, 083518 (2012); 10.1063/1.4759140Microstructure and temperature coefficient of resistance of thin cermet resistor films deposited from Cr Si 2 -Cr -Si C targets by S-gun magnetron In situ reflection high energy electron diffraction surface pole figure study of biaxial texture evolution in anisotropic Mg nanoblades during shadowing growth Molybdenum films were observed to undergo a dramatic change in crystal texture orientation when the incident flux angle was varied in an oblique angle sputter deposition on amorphous substrates. Reflection high-energy electron diffraction pole figure and scanning electron microscopy were used to analyze in detail the texture orientation of the films. The normal incident deposition resulted in a fiber texture film with the minimum energy (110) crystal plane parallel to the substrate surface. A (110)[1 10] biaxial texture was observed for the samples grown with low incident angles of less than 45 , with respect to the surface normal. On the other hand, for an oblique angle deposition of larger than 60 , a (111)[11 2] biaxial texture was observed and appeared to be consistent with a zone T structure where the geometrically fastest growth [001] direction of a crystal plays a dominant role in defining the texture. We argue that a structural transition had occurred when the incident flux was varied from near normal incidence to a large angle. V C 2012 American Institute of Physics. [http://dx.
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