The use of a honeycomb zeolite concentrator and an oxidation process is one of the most popular methods demonstrated to control volatile organic compound (VOCs) emissions from waste gases in semiconductor manufacturing plants. This study attempts to characterize the performance of a concentrator in terms of the removal efficiencies of semiconductor VOCs (isopropyl alcohol [IPA], acetone, propylene glycol methyl ether [PGME], and propylene glycol monomethyl ether acetate [PGMEA]) under several parameters that govern the actual operations. Experimental results indicated that at inlet temperatures of under 40 degrees C and a relative humidity of under 80%, the removal efficiency of a zeolite concentrator can be maintained well over 90%. The optimal rotation speed of the concentrator is between 3 and 4.5 rph in this study. The optimal rotation speed increases with the VOCs inlet concentration. Furthermore, reducing the concentration ratio helps to increase the removal efficiency, but it also increases the incineration cost. With reference to competitive adsorption, PGMEA and PGME are more easily adsorbed on a zeolite concentrator than are IPA and acetone because of their high boiling points and molecular weights.
Activated carbon (AC) is seldom applied for recovering ketone-based volatile organic compounds because of safety concerns. Adsorption of methyl ethyl ketone (MEK) with AC is a highly exothermic reaction that potentially causes fires in AC beds. Moreover, 2,3-butanediol (BDO) is produced in the desorbed solvent, causing yellowing and odor of the recovered solvent. This study applied a continuous adsorption-desorption apparatus for evaluating the operating capacities and BDO concentration in recovered MEK containing modified and original ACs. AC-1 (TAKETA-G2X) was used as the target for modification. The experimental results indicate that using MgO as the modifier increases the ignition point by 12°C and that applying KNO 3 as the modifier reduces the AC ignition point by 28°C (compared with AC-1). The BDO concentration of the desorbed MEK solvent can be reduced by increasing the loading of the modifying agent (Ethanolamine) (Im-1: 3.1 wt%; Im-5: 6.2 wt%). Moreover, applying the AC pretreated with nitrogen (Im-6) as adsorbent significantly reduces the BDO concentration (from 0.123 wt% to 0.073 wt%). Because desorption and purging procedures were performed in N 2 atmospheres, the BDO concentrations of the desorbed MEK solvents were relatively low and ranged from 0.032 wt% to 0.043 wt%. When the MEK concentration was reduced to 2000 ppm, lower BDO concentrations (0.012-0.022 wt%) were measured in the recovered MEK solvent. The way to modify activated carbon and a better desorbing sequence to effectively inhibit the oxidation of MEK to BDO are developed. The results obtained indicate that the BDO concentration in the desorbed solvent was lower than the original MEK solvent (0.023 wt%). Different approaches can be applied simultaneously to achieve high inhibition effects; however, carbon adsorption performance may be negatively affected.Implications: The study is motivated to improve the quality of recovered solvent and reduce fire hazards, particularly when AC is applied for adsorbing a ketone-based solvent (e.g., MEK). The experimental results indicate that the BDO concentration in the recovered solvent can be reduced and the ignition point of AC can be increased by modifying the AC with an appropriate agent.
This study aims to improve the performance of adsorbent for mesitylene, which is typically applied in the spray-coating industry. The zeolite MCM-41-AS is selected as a candidate for the investigation. Experimental results reveal that MCM-41-AS exhibits a good adsorption capacity for mesitylene and that it can be integrated with H-ZSM-5-25 for the simultaneous adsorption of mesitylene and toluene.
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