Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

Lin, Yu Chih; Chang, Feng Tang; Bai, Hsun-Ling; Pei, Bau-Shei

doi:10.1016/j.jhazmat.2004.12.035

Cited by 18 publications

(7 citation statements)

References 5 publications

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“…After applying the VOC-reduction process, the four dominant compounds were decane (36.24%), nonane (35.27%), undecane (23.24%), and octane (2.98%). VOCs with higher molecular weight tend to have lower vapor pressure, resulting in higher removal efficiency in a condenser [35]. This may be the primary reason for the changes in the dominant compounds and their composition before and after VOC removal.…”

Section: Reduction In Pocp-weighted and Soap-weighted Emissionmentioning

confidence: 99%

Reduction of Volatile Organic Compounds (VOCs) Emissions from Laundry Dry-Cleaning by an Integrated Treatment Process of Condensation and Adsorption

et al. 2021

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Volatile organic compounds (VOCs) are intermittently emitted at high concentrations (tens of thousands of ppmv) from small-scale laundry shops in urban areas, affecting the urban atmospheric environment. In this study, we suggested integrating VOC treatment processes incorporating condensation and adsorption in series to remove VOCs released from small-scale laundry dryers (laundry weighing less than 30 kg). We designed two different processes depending on regeneration modes for adsorber beds; an open-circuit flow process and a closed-loop flow process in regeneration mode. Our VOC treatment processes enable sustainable operation via the regeneration of adsorbers on a regular basis. Before applying the VOC treatment processes, average concentration of total volatile organic compounds (TVOCs) was 4099 ppmv (12,000 ppmv of the peak concentration) during the drying operation. After applying our closed-loop flow process, TVOC concentration decreased to 58 ppmv, leading to 98.5% removal efficiency. We also verified the robustness of our process performance in a continuous operation (30 cycles) by using a process simulation program. Lastly, we observed that our integrated treatment process can contribute to reductions in ozone and secondary organic aerosol generation by 90.4% and 95.9%, respectively. We concluded that our integrated VOC treatment processes are applicable to small-scale laundry shops releasing high-concentration VOCs intermittently, and are beneficial to the atmospheric environment.

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Section: Reduction In Pocp-weighted and Soap-weighted Emissionmentioning

confidence: 99%

Reduction of Volatile Organic Compounds (VOCs) Emissions from Laundry Dry-Cleaning by an Integrated Treatment Process of Condensation and Adsorption

et al. 2021

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“…Because VOCs have the characteristics of wide sources and complex components, so in the practical application, single technology is usually difficult to achieve VOCs effective purification, so the combined technology has become the current developing direction. Chemical oxidation is concerned because of its oxidation, high speed and high efficiency [7] . The Fenton reagent is firstly applied in waste-water treatment, which is one of the advanced oxidation processes, is recognized as a powerful photo-catalytic degradation technology [8,9] .…”

Section: Introductionmentioning

confidence: 99%

Study on purification of acetone gas by UV/Fenton

Zhao¹,

Kang²,

Ren³

et al. 2016

Proceedings of the 2015 2nd International Conference on Machinery, Materials Engineering, Chemical Engineering and Biotechnolog

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VOCs was one of main air pollutants. Fenton reaction was concerned because of its oxidation, high speed and high efficiency. In this paper, the Fenton reagent combined with UV was used to purify acetone gas, and the effect factors was studied. The results showed that the removal efficiency of acetone gas was highest, up to 90.2%, when pH value was about 3, oxidation reduction potential was 480mV. The removal rate of acetone gas increased nearly 5% when UV was added on Fenton reagent.

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“…However, DMSO could be biodegraded under anaerobic conditions through the reduction pathway to produce malodorous DMS minute amounts of which could cause major complaints by the adjacent residents or inside-park factory workers. In Taiwan, many previous research results revealed that odorous DMS compound was mainly transformed from DMSO used tremendously in TFT-LCD manufacture [1].…”

Section: Introductionmentioning

confidence: 99%

Effect of microbial activity on dimethyl sulfoxide degradation in an air-lift bioreactor

Hwang¹,

Lin²,

Chang³

et al. 2012

WIT Transactions on Ecology and the Environment

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Acclimatized dimethyl sulfoxide-degrading sludge can possess the ability to convert DMSO to odourless compounds specifically by repeated batches in an air-lift bioreactor. Moreover, DMSO usually causes a low microbial biomass growth, unstable operation and malodorous compounds emission in biological treatment because of its characteristic for activated sludge. A main focus of DMSO degrading performance is conducted by original sludge without longterm acclimation using an airlift bioreactor in this study. The result indicates various organisms of sludge poisoned by DMSO still secrete inducible oxidoreductase to improve volatile organic sulphur compounds degradation using DMSO as a substrate in an air-lift bioreactor. Using this method, the oxidoreductase in the supernatant of working medium is able to remove DMSO concentration from 50 up to 1000 mg L -1 completely by fed batch mode due to LB medium cultures and enhances the microbial activity of activated sludge. An optimal alternative performance was developed; the rate of DMSO biodegradation can accomplish 34.72 mg-DMSO h -1 g -1 -dry sludge weight. The best result showed that 500 mg L -1 of DMSO could be completely removed with 120 h under repeated mode. Control of microbial activity in high loading of DMSO and carbon content in wastewater were important factors for biodegradation of DMSO.

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Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

Cited by 18 publications

References 5 publications

Reduction of Volatile Organic Compounds (VOCs) Emissions from Laundry Dry-Cleaning by an Integrated Treatment Process of Condensation and Adsorption

Reduction of Volatile Organic Compounds (VOCs) Emissions from Laundry Dry-Cleaning by an Integrated Treatment Process of Condensation and Adsorption

Study on purification of acetone gas by UV/Fenton

Effect of microbial activity on dimethyl sulfoxide degradation in an air-lift bioreactor

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