Casimir forces between material surfaces at close proximity of less than 200 nm can lead to increased chaotic behavior of actuating devices depending on the strength of the Casimir interaction. We investigate these phenomena for phase change materials in torsional oscillators, where the amorphous to crystalline phase transitions lead to transitions between high and low Casimir force and torque states respectively, without material compositions. For a conservative system bifurcation curve and Poincare maps analysis show the absence of chaotic behavior but with the crystalline phase (high force/torque state) favoring more unstable behavior and stiction.However, for a non-conservative system chaotic behavior can occur introducing significant risk for stiction, which is again more pronounced for the crystalline phase. The latter illustrates the more general scenario that stronger Casimir forces and torques increase the possibility for chaotic behavior. The latter is making impossible to predict whether stiction or stable actuation 2 will occur on a long term basis, and it is setting limitations in the design of micro/nano devices operating at short range nanoscale separations.

We investigate the influence of Casimir and electrostatic torques on double-beam torsional microelectromechanical systems with materials covering a broad range of conductivities of more than three orders of magnitude. For the frictionless autonomous systems, bifurcation and phase space analysis shows a significant difference between stable and unstable operating regimes for equal and unequal applied voltages on both sides of the double torsional system giving rise to heteroclinic and homoclinic orbits, respectively. For equal applied voltages, only the position of a symmetric unstable saddle equilibrium point is dependent on the material optical properties and electrostatic effects, while in any other case stable and unstable equilibrium points are dependent on both factors. For the periodically driven system, a Melnikov function approach is used to show the presence of chaotic motion rendering predictions of whether stiction or stable actuation will take place over long times impossible. Chaotic behavior introduces significant risk for stiction, and it is more likely to occur for the more conductive systems that experience stronger Casimir forces and torques. Indeed, when unequal voltages are applied, the sensitive dependence of chaotic motion on electrostatics is more pronounced for the highest conductivity systems.

We investigate here how the optical properties at low frequencies affect the actuation dynamics and emerging chaotic behavior in a double-beam torsion actuator at nanoscale separations (<200 nm), where the Casimir forces and torques play a major role. In fact, we take into account differences of the Casimir force due to alternative modeling of optical properties at low frequencies, where measurements are not feasible, via the Drude and plasma models, and repercussions by different material preparation conditions. For conservative autonomous actuation, bifurcation and phase portrait analysis indicate that both factors affect the stability of an actuating device in such a way that stronger Casimir forces and torques will favor increased unstable behavior. The latter will be enhanced by unbalanced application of electrostatic voltages in double-beam actuating systems. For the case of a time-periodic driving force, we use a Melnikov function and a phase plane analysis to study the emerging chaotic behavior with respect to the Drude and plasma modeling and material preparation conditions. We find indications that any factor that leads to stronger Casimir interactions will aid chaotic behavior and prevent long term prediction of the actuating dynamics. Moreover, in a double-beam actuator chaoticity will be amplified by the application of unbalanced electrostatic voltages. Therefore, the details of modeling of optical properties and the material preparations conditions must be carefully considered in the design of actuating devices at nanoscale because here Casimir forces are omnipresent and broadband type interactions.

The sensitivity of nonequilibrium Casimir forces on material optical properties can have strong impact on the actuation of devices. For this purpose, we considered nonequilibrium Casimir interactions between good and poor conductors, for example, gold (Au) and highly doped silicon carbide (SiC), respectively. Indeed, for autonomous conservative systems, the bifurcation and phase portrait analysis have shown that the nonequilibrium Casimir forces can have signi cant impact on the stable and unstable operating regimes depending on the material optical properties. At a few micrometer separations, for systems with high conductivity materials, an increasing temperature di erence between the actuating components can enhance the stable operation range due to the reduction of the Casimir force, while for the poor conductive materials, the opposite takes place. For periodically driven dissipative systems, the Melnikov function and Poincare portrait analysis have shown that for poor conductive systems, the nonequilibrium Casimir forces lead to an increased possibility for chaotic behavior and stiction with an increasing temperature di erence between the actuating components. However, for good conducting systems, the thermal contribution to Casimir forces reduces the possibility for chaotic behavior with increasing temperature, as comparison with systems without thermal uctuations shows. Nevertheless, the positive bene t of good conductors toward increased actuation stability and reduced the chaotic behavior under nonequilibrium conditions can be easily compromised by any voltage application. Therefore, thermal, nonequilibrium Casimir forces can in uence the actuation of devices toward unstable and chaotic behavior in strong correlation with their optical properties, and associated conduction state, as well as applied electrostatic potentials.

Here, we investigate the dynamical sensitivity of electrostatic torsional type microelectromechanical systems (MEMS) on the optical properties of interacting materials. This is accomplished by considering the combined effect of mechanical Casimir and electrostatic torques to drive the device actuation. The bifurcation curves and the phase portraits of the actuation dynamics have been analyzed to compare the sensitivity of a single beam torsional device operating between materials with conductivities that differ by several orders of magnitude. It is shown that the range of stable operation of torsional MEMS against stiction instabilities can increase by decreasing the conductivity of interacting materials. Moreover, the introduction of controlled dissipation, corresponding to a finite quality factor, in an otherwise unstable torsional system, could alter an unstable motion towards stiction to dissipative stable motion. Published by AIP Publishing.

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Abstract. With Casimir and electrostatic forces playing a crucial role for the performance and stability of microelectromechanical systems (MEMS), the presence of chaotic behavior, which is often unavoidable, leads to device malfunction due to stiction. Therefore, we investigate here how the optical properties of different materials influence the chaotic behavior of electrostatic torsional MEMS due to changes in magnitude of the Casimir forces and torques. We consider the materials Au, which is a good conductor, AIST, which is a phase change material being close to metal in the crystalline state, and finally doped SiC as a very poor conductor. For the conservative systems, there is no chaotic behavior and the analysis of phase portraits and bifurcation diagrams reveal the strong sensitivity of stable actuation dynamics on the material optical properties, while applied electrostatic potentials lead faster to instability and stiction for higher conductivity materials. For the driven systems, the Melnikov method is used to study the chaotic behavior. The results from this method are supported by the study of the contours of the transient time to stiction in the phase plane, which reveal a substantially increased chaotic behavior for higher conductivity materials, associated with stronger Casimir torques and applied electrostatic potentials.

Here, we investigate the sensitivity of nonequilibrium Casimir forces to optical properties at low frequencies via the Drude and plasma models and the associated effects on the actuation of microelectromechanical systems. The stability and chaotic motion for both autonomous conservative and nonconservative driven systems were explored assuming good, e.g., Au, and poor, e.g., doped SiC, interacting conductors having large static conductivity differences. For both material systems, we used the Drude and plasma methods to model the optical properties at low frequencies, where measurements are not feasible. In fact, for the conservative actuating system, bifurcation and phase space analysis show that the system motion is strongly influenced by the thermal nonequilibrium effects depending on the modeling of the optical properties at low frequencies, where also the presence of residual electrostatic forces can also drastically alter the actuating state of the system, depending strongly on the material conductivity. For nonconservative systems, the Melnikov function approach is used to explore the presence of chaotic motion rendering predictions of stable actuation or malfunction due to stiction on a long-term time scale rather impossible. In fact, the thermal effects produce the opposite effect for the emerging chaotic behavior for the Au-Au and SiC-SiC systems if the Drude model is used to model the low optical frequencies. However, using the plasma model, only for the poor conducting SiC-SiC system, the chance of chaotic motion is enhanced, while for the good conducting Au-Au system, the chaotic behavior will remain unaffected at relatively short separations (<2 µm).