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The transient method of the mass flow rate measurements through a microporous media is developed and analyzed. This method is based on the constant volume technique and the exponential fit of the pressure evolution in each tank which allows calculating the permeability directly. The pressure relaxation time, a single fitting parameter, is introduced and its behaviors are analyzed in a large pressure range. By measuring the pressure relaxation time for one gas, the permeability of a microporous sample can be derived for the other gases. With the actual experimental setup, we measured the mass flow rate through the microporous media in the range 5 • 10 −7 − 5 • 10 −12 [kg s −1 ] and the permeability in the range 10 −14 − 10 −11 [m 2 ].

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The transient method of the mass flow rate and permeability measurements through a microporous media, developed previously, is used here to extract different characteristics of the media. By implementing the model of porous media as a bundle of capillaries the effective pore dimension is extracted from the measurements, and its physical interpretation is given. This methodology shows promising results to be used as a non-destructive method of micro-andnanoporous media analysis. The permeability is also extracted directly from the measurements of the pressure variation in time. By using additional information about the sample porosity, the number of capillaries, the tortuosity and the internal surface of the sample are calculated. The extracted values are very close to that obtained by the mercury porosimetry and by microtomography.

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Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments. (2014) Microelectronic Engineering, 113. 114-122.