Hexagonal boron nitride (h-BN) is the only known material aside from graphite with a structure composed of simple, stable, non-corrugated atomically thin layers. While historically used as lubricant in powder form, h-BN layers have become particularly attractive as an ultimately thin insulator. Practically all emerging electronic and photonic device concepts rely on h-BN exfoliated from small bulk crystallites, which limits device dimensions and process scalability.Here, we address this integration challenge for mono-layer h-BN via a chemical vapour deposition process that enables crystal sizes exceeding 0.5 mm starting from commercial, reusable platinum foils, and in unison allows a delamination process for easy and clean layer transfer. We demonstrate sequential pick-up for the assembly of graphene/h-BN heterostructures with atomic layer precision, while minimizing interfacial contamination. Our process development builds on a systematic understanding of the underlying mechanisms. The approach can be readily combined with other layered materials and opens a scalable route to h-BN layer integration and reliable 2D material device layer stacks.
Articles you may be interested inCorrelation between the structural and cathodoluminescence properties in InGaN/GaN multiple quantum wells with large number of quantum wells J. Vac. Sci. Technol. A 32, 051503 (2014); 10.1116/1.4889857 Correlations between the morphology and emission properties of trench defects in InGaN/GaN quantum wells J. Appl. Phys. 113, 073505 (2013); 10.1063/1.4792505 Morphological evolution of InGaN/GaN quantum-well heterostructures grown by metalorganic chemical vapor deposition Influence of strain-induced indium clustering on characteristics of InGaN/GaN multiple quantum wells with high indium composition
-Ga2O3 is a metastable phase of Ga2O3 of interest for wide bandgap engineering since it is isostructural with -In2O3 and -Al2O3. -Ga2O3 is generally synthesised under high pressure (several GPa) or relatively high temperature (~500 o C). In this study, we report the growth of -Ga2O3 by low temperature atomic layer deposition (ALD) on sapphire substrate. The film was grown at a rate of 0.48 Å/cycle, and predominantly consists of -Ga2O3 in the form of (0001)-oriented columns originating from the interface with the substrate. Some inclusions were also present, typically at the tips of the -phase columns and most likely comprising -Ga2O3. The remainder of the Ga2O3 filmi.e. nearer the surface and between the -Ga2O3 columns, was amorphous. The film was found to be highly resistive, as is expected for undoped material. This study demonstrates that -Ga2O3 films can be grown by low temperature ALD and suggests the possibility of a new range of ultraviolet optoelectronic and power devices grown by ALD. The study also shows that scanning electron diffraction is a powerful technique to identify the different polymorphs of Ga2O3 present in multiphase samples.
Photoluminescence and electroluminescence measurements on InGaN/GaN quantum well (QW) structures and light emitting diodes suggest that QWs with gross fluctuations in width (formed when, during growth, the InGaN is exposed unprotected to high temperatures) give higher room temperature quantum efficiencies than continuous QWs. The efficiency does not depend on the growth temperature of the GaN barriers. Temperature-dependent electroluminescence measurements suggest that the higher efficiency results from higher activation energies for defect-related non-radiative recombination in QW samples with gaps. At high currents the maximum quantum efficiency is similar for all samples, indicating the droop term is not dependent on QW morphology.
InGaN-based light emitting diodes and multiple quantum wells designed to emit in the green spectral region exhibit, in general, lower internal quantum efficiencies than their blue-emitting counter parts, a phenomenon referred to as the “green gap.” One of the main differences between green-emitting and blue-emitting samples is that the quantum well growth temperature is lower for structures designed to emit at longer wavelengths, in order to reduce the effects of In desorption. In this paper, we report on the impact of the quantum well growth temperature on the optical properties of InGaN/GaN multiple quantum wells designed to emit at 460 nm and 530 nm. It was found that for both sets of samples increasing the temperature at which the InGaN quantum well was grown, while maintaining the same indium composition, led to an increase in the internal quantum efficiency measured at 300 K. These increases in internal quantum efficiency are shown to be due reductions in the non-radiative recombination rate which we attribute to reductions in point defect incorporation.
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