Minor flaws are becoming extremely relevant as the complexity of the semiconductor package evolves. Scanning acoustic microscopy is one analytical tool for detecting flaws in such a complex package. Minor changes in the reflected signal that could indicate a fault can be lost during image reconstruction, despite the high sensitivity. Because of recent AI (Artificial Intelligence) advancements, more emphasis is being placed on developing AI-based algorithms for high precision-automated signal interpretation for failure detection. This paper presents a new deep learning model for classifying ultrasound signals based on the ResNet architecture with 1D convolution layers. The developed model was validated on two test case scenarios. One use case was the detection of voids in the die attach, the other the detection of cracks below bumps in Flip-chip samples. The model was trained to classify signals into different classes. Even with a small dataset, experiment results confirmed that the model predicts with a 98 percent accuracy. This type of signal-based model could be extremely useful in situations where obtaining large amounts of labeled image data is difficult. Through this work we propose an intelligent signal classification methodology to automate high volume failure analysis in semiconductor devices.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.