1998
DOI: 10.1016/s0040-6090(98)00990-0
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Depth profiling of non-conductive oxidic multilayers with plasma-based SNMS in HF-mode

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Cited by 9 publications
(2 citation statements)
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“…The detection limit is 10 ppm. Some further details regarding the technique are in Goschnick et al (1998). …”
Section: Methodsmentioning
confidence: 99%
“…The detection limit is 10 ppm. Some further details regarding the technique are in Goschnick et al (1998). …”
Section: Methodsmentioning
confidence: 99%
“…SIMS and SNMS allow depth profile analysis with a depth resolution in the low-nanometre range of hard coatings [93], atmospheric aerosol particles (with aerodynamic diameters on the order of 25-200 nm) [94], nano-objects (nanowhiskers consist of fibres of about 2-nm diameter) [95] and nanoscale multilayers [96][97][98][99][100]. Figure 5 shows the depth profiles obtained by SNMS for a triple-layer system used for gas sensor microdevices (Fig.…”
Section: Secondary Ion Mass Spectrometry and Sputtered Neutral Mass Smentioning
confidence: 99%