Pb(Zr1-xTix)O3 (PZT) polycrystalline thin films were prepared by sol–gel and pulsed laser deposition techniques on Pt/Ti/SiO2/Si (Pt) and SrRuO3/LaAlO3 (SRO/LAO) substrates. Infrared reflectivity spectroscopy with oblique (45°) light incidence revealed both the 3LO (688 cm-1) phonon lineshape asymmetry decrease with increasing in thickness and the thinner, disordered boundary layer at the SRO/PZT interface independently of the film preparation method. The fatigue properties of PZT films were studied for various crystallographic orientations. It was observed that in the 52/48 PZT/SRO/LAO film, when the field is applied along the (001) direction, excellent fatigue resistance is obtained.
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