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In this communication, we present the fabrication and the characterisation of micro-heating elements made on polyimide (PI) sheets and on spin coated polyimide membranes. Different types of polyimide and heater materials were investigated to realise micro-hotplates for gas-sensing and thermal actuating applications. The effects of the type of polyimide used and of the different annealing performed on the mechanical and electrical properties of the metallic heaters were characterised. Using an optimised combination of materials and processes, flexible micro-hotplates on polyimide sheets and on polyimide membranes on silicon were realised and their thermal properties evaluated. Platinum and aluminium microheating elements on polyimide exhibited promising characteristics for their integration in low-power gas sensors and thermal actuators.

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Modulation of surface stresses is a recent and promising method to perform mesoscale manipulation of components in liquid medium. We present a promising approach using infra red laser-induced thermocapillary-driven flow for handling multiple or single large and heavy objects. The objects are immersed in thin liquid layers and in contact with the substrate surface. These objects can be handled with high speed thermocapillary convection flow reaching significant forces depending on the object sizes. Velocity measurements showed that 92 m-sized spherical beads can be dragged with velocities of about 5.5 mm/s. Parallel non-contact micromanipulation can be achieved.