Micro-hotplates on polyimide for sensors and actuators

Briand, D.; Colin, Stéphane; Gangadharaiah, A.; Vela, Emir A.; Dubois, Philippe; Thiéry, Laurent; Rooij, N. F. de

doi:10.1016/j.sna.2006.06.003

Cited by 50 publications

(35 citation statements)

References 9 publications

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“…As a result, microsensor arrays obtained using such microhotplate design will undoubtedly suffer from a very low sensor density. Briand et al [17] have reported to make microhotplate gas sensor on a polyimide layer (as insulating layer) to avoid tedious front micromachining involved in processing air pit microhotplate gas sensors. However, they end up with a hotplate size of 1.5 mm wide and power consumption of 66 mW to reach the temperature of 325 • C. Therefore, we are in urgent need of area efficient gaseous sensor design with low power consumption to present a cost-effective manufacturing of sensor arrays on the wafer.…”

Section: Introductionmentioning

confidence: 99%

Microhotplates for low power, and ultra dense gaseous sensor arrays using recessed silica aerogel for heat insulation

Jalali¹,

Kumar²,

Madani³

et al. 2013

2013 IEEE Sensors Applications Symposium Proceedings

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Abstract-In the operation of air pitted gaseous sensor the microhotplate (µHP) consumes almost all the power used by the sensor. The required area to micromachine the air pit for the µHP of a single sensor is several times more than the actual area required by the sensor itself. The feasibility of implementing low power and ultra dense gaseous sensor array is investigated by developing a new µHP structure using recessed silica aerogel. In comparison with the conventional µHP structure, the recessed aerogel not only has decreased the utilized area of the chip almost ten folds (181 × 181 µm 2 vs. 573 × 573 µm 2 ) to maintain a temperature of 360 • C but also has decreased the power consumed by each µHP more than two folds (1 mW vs. 2.1 mW ). As the number of sensors increases in a sensor array, the saved area of the chip increases quadratic by using the new structure. Moreover, the power consumed by the new designed structure reduces drastically.

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Section: Introductionmentioning

confidence: 99%

Microhotplates for low power, and ultra dense gaseous sensor arrays using recessed silica aerogel for heat insulation

Jalali¹,

Kumar²,

Madani³

et al. 2013

2013 IEEE Sensors Applications Symposium Proceedings

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“…Compared to the work we have recently reported on the development of micro-heating elements on polyimide (PI) for sensors and actuators [5], we detail here the application of polymeric hotplates for the realisation of low-power metal-oxide gas sensors. Specific fabrication processes are evaluated for the integration of metal-oxide gas sensors on two types of PI hotplates, made on PI sheets and on silicon substrates.…”

Section: E-mail Address: Danickbriand@uninech (D Briand)mentioning

confidence: 99%

“…The polyimide micro-hotplates on Upilex and on silicon withstood an annealing in air at a maximum temperature of 450 • C, the membrane from the silicon device exhibited a significant membrane deformation compared to the Upilex device [5]. Therefore, these polymeric gas-sensing platforms were drop coated with SnO 2 and annealed in air at 450 • C. The MOX gas sensors realised on the two types of polyimide micro-hotplates are presented in Figs.…”

Section: Fabricationmentioning

confidence: 99%

“…In this communication, we present the validation of the compatibility of metal-oxide gas sensitive films with low-power polymeric transducers. The development of transducers on polymers for metal-oxide gas sensors has been reported lately, nevertheless, the complete integration of metal-oxide (MOX) films on polymeric hotplates has not been demonstrated yet [4,5]. Neither * Corresponding author.…”

Section: Introductionmentioning

confidence: 99%

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Integration of MOX gas sensors on polyimide hotplates

Briand

Colin

Courbat

et al. 2008

Sensors and Actuators B: Chemical

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In this communication, we report on the integration of metal-oxide gas sensors on polymeric micro-hotplates made on polyimide and silicon substrates. Low-power consumption micro-hotplates with platinum electrodes and heaters were fabricated on polyimide membranes. Their thermal behavior was optimized using temperature probing at the micro-scale level coupled with thermal simulations. Tin oxide thick films were successfully integrated on these polyimide micro-hotplates using the drop coating technique. The annealing process of the tin oxide drops on the polyimide substrate was investigated and gas measurements are presented. Compared to the polyimide hotplates on silicon substrates, the hotplates made on polyimide sheets are simpler to process and more robust, and therefore, they are more suitable for the integration of metal-oxide films. Finally, a wafer level packaging technique using multiple polyimide layers was developed and led to a polymeric platform for metal oxide sensors. The technology is also promising for the integration of polyimide humidity sensors, of resistive and capacitive gas-sensitive polymeric films to realise fully flexible gas sensor arrays.

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“…(12) Platinum is selected as the sensor sensitive material, as it has a good thermal response that corresponds linearly to temperature. (13)(14)(15) There is much interest in the development of polyimide-based devices for medical applications, which include implantable microelectrodes (16) for neural prostheses, (17) micro-hotplates and microheater arrays, (18,19) and bolometers. (20) To our knowledge, no one has addressed the fabrication of a temperature microsensor to measure the temperature distribution on the skin during ultrasound exposure.…”

Section: Introductionmentioning

confidence: 99%

Flexible Temperature Microsensor for Application of High-Intensity Focused Ultrasound

2017

Sensors and Materials

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A flexible temperature microsensor based on a polyimide thin-film substrate is presented. The polyimide thin-film substrate can achieve good contact with skin during tumor ablation, and it has a high ultrasonic propagation rate when ultrasound is passed though the thin substrate. A serpentine structure of platinum film is designed as the sensing element, and the sensor is fabricated using microfabrication technology. The characteristics of the sensor were studied in the temperature range from 25 to 100 °C. The testing results show that there is a good linear relationship between resistance and temperature, and the temperature coefficient of resistance (TCR) of the flexible temperature microsensor is 2035 ppm/°C. The current-voltage (I-V) curve shows that the temperature can be precisely detected when the drive current is lower than 20 mA. Impedance testing results show that impedance does not change with the frequency of the AC current. In addition, the impedance of the sensor under AC conditions has the same value as the resistance under DC conditions, indicating that the performance measured under DC current is the same as that measured under AC current. Such a flexible microsensor can be used to measure the temperature distribution for high-intensity focused ultrasound (HIFU).

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Micro-hotplates on polyimide for sensors and actuators

Cited by 50 publications

References 9 publications

Microhotplates for low power, and ultra dense gaseous sensor arrays using recessed silica aerogel for heat insulation

Microhotplates for low power, and ultra dense gaseous sensor arrays using recessed silica aerogel for heat insulation

Integration of MOX gas sensors on polyimide hotplates

Flexible Temperature Microsensor for Application of High-Intensity Focused Ultrasound

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