A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.
A new approach for modeling steady state inductively coupled radio frequency discharges at low pressure is described. A simple one-dimensional model is considered, which includes Maxwell’s equations and the electron balance equation with boundary conditions of the third kind. It is shown that the system of boundary value problems is a two-parameter partial eigenvalue problem. The smallest eigenvalue of the problem is the boundary value of the magnetic field strength. The second parameter of the problem is the concentration of electrons at the center of the plasma bunch. The developed approach makes it possible to calculate the inductor current required to maintain a steady state of the discharge. The results of calculations of the dependence of the inductor current, electron density, electric and magnetic fields on pressure are presented.
An installation for numerical and experimental studies of low-pressure radio frequency plasma for surface modification of functional materials with equipment for data synchronization are presented. The equipment for data synchronization as well as intermediate results for plasma generation are showed.
A mathematical model of low-pressure RF plasma flow taking into consideration electron temperature influence is presented. Results of calculations of carrier gas velocity, pressure and temperature as well as electron density and electron temperature in plasma flow are showed. Influence of electric field on electron temperature and plasma flow is analyzed.
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