2020
DOI: 10.1088/1742-6596/1588/1/012018
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Experimental installation to study the RF plasma flow at low pressures with experiment data synchronization

Abstract: A diagram and description of an experimental setup for studying the properties of a stream of RF plasma at low pressure are presented. The setup is equipped with diagnostic devices that record the temperature, volt-ampere characteristics, and pressure in the chamber.

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Cited by 14 publications
(10 citation statements)
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“…Low-temperature plasma can be used for the synthesis of various nanostructures and is well suited for the modification of various surfaces. This is shown in many works [10][11][12][13].…”
Section: Discussionmentioning
confidence: 66%
“…Low-temperature plasma can be used for the synthesis of various nanostructures and is well suited for the modification of various surfaces. This is shown in many works [10][11][12][13].…”
Section: Discussionmentioning
confidence: 66%
“…Low-temperature plasma can be used for the synthesis of various nanostructures and is well suited for the modification of various surfaces. This is shown in many works [7][8][9].…”
Section: Main Partmentioning
confidence: 64%
“…Low-temperature plasma can be used for the synthesis of various nanostructures and is well suited for the modification of various surfaces. This is shown in many works [4][5][6][7][8][9][10][11][12][13][14][15][16][17][18].…”
Section: Using Equation (1) Taking Into Account the Values Of Tablementioning
confidence: 65%