Magnetron sputtered nanocrystalline SnO 2 thin films annealed at 500 C during 4 h were investigated by X-ray diffraction, electron microscopy and electrical methods. The comparison of calculated Debye length and experimentally measured grain size was used for the determination of electron transport mechanism in the wide temperature range from 20 to 400 C . The investigation of gas-response SnO 2 films as a function of ethanol concentration was used in the modeling of surface processes in SnO 2 polycrystalline layers.
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