Micropatterning of BiSrCaCuO(BSCCO) superconducting thin films has been successfully accomplished by using a pulsed KrF excimer laser with a wavelength of λ=248 nm and a duration of 25 ns. The optimum energy density of the laser was 0.36 Jcm -2 for etching of these films. For example, a superconducting microstructure of BSCCO film with nominally 3 μm wide and 2 μm long, showed no degradation in T c and J c . Excimer laser patterning technique yields reproducible patterning without any degradation of superconducting properties. The etching bordering and surface morphology was examined using an atomic force microscope.
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