We propose a facile and combined methodology to develop magnetron sputtered various metals and alloy (e.g. tungsten, tin and nichrome), and metal oxide (indium tin oxide) thin film-based micro-patterns deposited on flexible and rigid substrates utilizing reusable patterned mask. CO 2 laser-cut glass-based mask is fabricated and assembled with the substrates for pattern printing by sputtered thin film deposition technique. Fabrication of mask is adopted with the rapid CO 2 laser-cut process aided with computer-aided design software. The laser-cut glass-based mask can easily fix on any type of substrates and any resistive materials deposition can be carried out. Currently, the developed thin film micropatterns show good uniformity, dense morphology and without sign of any discontinuity. Finally, a successful functional characterization of a typical nichrome line-heater also confirms the feasibility and proof of concept of the present proposed approach that is much facile, less time-consuming and economical.
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