Thermal Conductivity Measurement of Soda–Lime–Silica Glass by Transient 3$$\omega$$ Method with Au Thin Film-Based Micro-heater/Temperature Sensor Fabricated by an Innovative Approach

A facile and combined methodology to fabricate sputtered thin film micro-patterns for heater/sensor applications utilizing CO2laser-cut masks

“…The SEM micrographs suggest the uniform edge and no signatures of material discontinuity and microcracks over the entire surface of a line pattern. High magnification SEM studies have been carried out by the present authors group [41] for the metal line heater pattern adopting similar masking method followed by sputtering. This represents the clean and sharp cutting of the quartz mask pattern by CO 2 laser method.…”

“…Hence, to overcome most of the masking difficulties with keeping in mind simple masking process and universal for any resistive material deposition, we have proposed a new and unique methodology of patterning by using CO 2 laser cutting technique. Present author's group [40, 41] had already demonstrated the utilization of CO 2 laser technique to cut fragile thin film-based multilayered thin quartz glass-based rigid optical solar reflector (OSR) [40] with good preciousness and pattern cut for 3 ω based instrumentation used for thermal conductivity measurement purpose [41]. The development of mask is a rapid method and could be re-used.…”