The silicon nitride (Si 3 N 4 ) planar waveguide platform has enabled a broad class of low-loss planar-integrated devices and chip-scale solutions that benefit from transparency over a wide wavelength range (400-2350 nm) and fabrication using wafer-scale processes. As a complimentary platform to silicon-on-insulator (SOI) and III-V photonics, Si 3 N 4 waveguide technology opens up a new generation of systemon-chip applications not achievable with the other platforms alone. The availability of low-loss waveguides (<1 dB/m) that can handle high optical power can be engineered for linear and nonlinear optical functions, and that support a variety of passive and active building blocks opens new avenues for systemon-chip implementations. As signal bandwidth and data rates continue to increase, the optical circuit functions and complexity made possible with Si 3 N 4 has expanded the practical application of optical signal processing functions that can reduce energy consumption, size and cost over today's digital electronic solutions. Researchers have been able to push the performance photonic-integrated components beyond other integrated platforms, including ultrahigh Q resonators, optical filters, highly coherent lasers, optical signal processing circuits, nonlinear optical devices, frequency comb generators, and biophotonic system-on-chip. This review paper covers the Manuscript
An overview of the most recent developments and improvements to the low-loss TriPleX Si 3 N 4 waveguide technology is presented in this paper. The TriPleX platform provides a suite of waveguide geometries (box, double stripe, symmetric single stripe, and asymmetric double stripe) that can be combined to design complex functional circuits, but more important are manufactured in a single monolithic process flow to create a compact photonic integrated circuit. All functionalities of the integrated circuit are constructed using standard basic building blocks, namely straight and bent waveguides, splitters/combiners and couplers, spot size converters, and phase tuning elements. The basic functionalities that have been realized are: ring resonators and Mach-Zehnder interferometer filters, tunable delay elements, and waveguide switches. Combination of these basic functionalities evolves into more complex functions such as higher order filters, beamforming networks,
A novel class of optical waveguides with a box-shaped cross section consisting of a low-index inner material surrounded by a thin high-index coating layer is presented. This original multilayered structure widens the traditional concept of index contrast for dielectric waveguides toward a more general concept of effective index contrast, which can be artificially tailored over a continuous range by properly choosing the thickness of the outer high-index layers. An electromagnetic analysis is reported, which shows that the transverse electric and transverse magnetic modes are spatially confined in different regions of the cross section and exhibit an almost 90° rotational symmetry. Such unusual field distribution is demonstrated to open the way to new intriguing properties with respect to conventional waveguides. Design criteria are provided into details, which mainly focus on the polarization dependence of the waveguide on geometrical parameters. The possibility of achieving single-mode waveguides with either zero or high birefringence is discussed, and the bending capabilities are compared to conventional waveguides. The feasibility of the proposed waveguide is demonstrated by the realization of prototypal samples that are fabricated by using the emerging CMOS-compatible Si3N4–SiO2 TriPleX technology. An exhaustiveexperimental characterization is reported, which shows propagation loss as low as state-of-the-art low-index-contrast waveguides (< 0.1 dB/cm) together with enhanced flexibility in the optimization of polarization sensitivity and confirms the high potentialities of the proposed waveguides for large-scale integrated optics
Offering open-access silicon photonics-based technologies has played a pivotal role in unleashing this technology from research laboratories to industry. Fabless enterprises rely on the open-access of these technologies for their product development. In the last decade, a diverse set of open-access technologies with medium and high technology readiness levels have emerged. This paper provides a review of the open-access silicon and silicon nitride photonic IC technologies offered by the pilot lines of European research institutes and companies. The
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