a b s t r a c tThe construction of a new generation of MEMS which includes micro-assembly steps in the current microfabrication process is a big challenge. It is necessary to develop new production means named micromanufacturing systems in order to perform these new assembly steps. The classical approach called ''top-down'' which consists in a functional analysis and a definition of the tasks sequences is insufficient for micromanufacturing systems. Indeed, the technical and physical constraints of the microworld (e.g. the adhesion phenomenon) must be taken into account in order to design reliable micromanufacturing systems. A new method of designing micromanufacturing systems is presented in this paper. Our approach combines the general ''top-down'' approach with a ''bottom-up'' approach which takes into account technical constraints. The method enables to build a modular architecture for micromanufacturing systems. In order to obtain this modular architecture, we have devised an original identification technique of modules and an association technique of modules. This work has been used to design the controller of an experimental robotic micro-assembly station.
A new piezoelectric actuator with collocated sensor is designed, modeled and simulated. The structure has three piezoelectric layers where the two external layers serve for the actuation by a convenient application of electrical potentials, and the middle layer serves as the sensor. After presenting the principle of the structure, a model is developed for the actuator and as well as for the sensor. Then simulation is carried out to evaluate their performances. The novel structure is very promising for applications that require control and automation, especially in situations where the use of sensors is unfeasible or difficult.
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