This paper deals with robotic micro-assembly of silicon micro-objects whose sizes are tens of micrometers. This production means is one of a more promising approach to realize 3D and/or hybrid microsystems. Current works in robotic micro-assembly are focused on the assembly of microobjects on a large substrate. We are focusing in the study of micro-parts assembly to build microscopic subsystems usable in larger products. This approach requires specific functionalities like a 'micro-vise' required to block the first object during assembly. Original strategies are proposed and applied on an experimental robotic structure composed of micropositionning stages, videomicroscopes, piezogripper, and silicon endeffectors. Some experimental teleoperated micro-assemblies has validated the proposed methods and the reliability of the principles. Future works will be focused on micro-assembly automation.
Micromanipulation is a key task to perform serial assembly of MEMS. The two-fingered microgrippers are usable but require specific studies to be able to work in the microworld. In this paper, we propose a new microgripping system where actuators and the end-effectors of the gripper are fabricated separately. End-effectors can thus be adapted to the manipulated micro-objects without new design and/or fabrication of the actuator. The assembly of the end-effectors on our piezoelectric actuators guarantee a great modularity for the system. This paper focuses on the original design, development and experimentation of new silicon end-effectors, compatible with our piezoelectric actuator. These innovative end-effectors are realized with the well known DRIE process and are able to perform micromanipulation tasks of objects whose typical size is between 5 µm and 1 mm.
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