The application of microlaser assisted machining of precision optical components made of optical grade single-crystal Si is reviewed. An optical raytracing model is developed and used for predicting the laser interaction with the workpiece. Optical characterization of the system is shown to be in good agreement with that predicted by the model. Using the information from the simulation and experimental validation, the laser-assisted diamond turning of single-crystal Si samples is shown to have exhibited little to no brittle fracture on the surface and the potential of extending the diamond tooling life by 150%.

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