Indium-doped zinc oxide (IZO) films were prepared by the spray pyrolysis technique. The effect of gradual incorporation of indium cations on the structural, electrical, and compositional properties of IZO films was studied in detail. It was observed that even a small addition of indium modifies the preferred growth of IZO film from the [002] direction to the [101] direction. Such a modification in growth pattern is a result of more nucleating centers created by indium doping. Indium dopant improves the electrical properties of the films. The carrier concentration depends mainly on the indium dopant level while the mobility is affected by the changes in crystal orientation that take place due to addition of dopants. X-ray photoelectron spectroscopy results show that indium doping does not lead to any stoichiometric changes in the IZO films and the dopant incorporation in the film is linearly proportional to that in the solution.
Antimony-doped tin oxide films were deposited by spray pyrolysis technique. The effect of antimony doping on structural and electrical properties was investigated in detail using the x-ray diffraction technique and room-temperature Hall measurements. Antimony doping did not affect the preferred growth along [200] to a considerable extent. These results were analyzed on the basis of structure factor calculations. From the Hall measurements, the lowest electrical resistivity, i.e., 5.2×10−4 Ω cm was observed for the films with a doping level of 2.3 at. % in the solution. This value of electrical resistivity is the lowest reported so far in the case of spray deposited antimony-doped SnO2 films. The grain boundary and ionized impurity scattering were observed to be prevalent in governing the electronic transport of lightly and heavily doped films, respectively.
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