Bimorph mirrors place stringent requirements on the welding technology of silicon substrates and piezoelectric ceramics to ensure their ultrahigh-vacuum compatibility. Conventional welding techniques usually require high temperature and pressure, which have a high impact on the welding substrate, while the use of organic adhesives for bonding does not guarantee their stability in ultrahigh vacuum. Here, the transient liquid phase bonding technology based on an Au–In metal system was studied to meet the requirement for ultrahigh-vacuum application. The microstructure, chemical composition, and related mechanical properties of the bonding at different welding conditions were investigated. Meanwhile, the piezo ceramics and the bond were baked at 150 °C to test the stability. The results show that a stable bonding was achieved between centimeter-scaled single crystal silicon and lead zirconate titanate ceramics at 200 °C temperature and 2.5 MPa pressure, and the piezo ceramics and the bond are not damaged by baking to 150 °C for 48 h.
The beamline optical system in the fourth generation synchrotron radiation light source and free-electron laser facilities puts forward harsh requirements on the performance of optical components, among which, the bimorph mirror is an adaptive optical component designed to meet the ultra-high surface shape progress regulation of the component and the wavefront compensation of the beamline. Domestic design and processing of bimorph mirror technology is still in urgent need of technical breakthroughs. To address this issue, we have studied the fabrication process of bimorph mirror, analyzed the design of the brake unit size in the bimorph mirror and the influence of the mirror clamp support method on the deformation process.
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