Bimorph mirror processing and fabrication research

Abstract

The beamline optical system in the fourth generation synchrotron radiation light source and free-electron laser facilities puts forward harsh requirements on the performance of optical components, among which, the bimorph mirror is an adaptive optical component designed to meet the ultra-high surface shape progress regulation of the component and the wavefront compensation of the beamline. Domestic design and processing of bimorph mirror technology is still in urgent need of technical breakthroughs. To address this issue, we have studied the fabrication process of bimorph mirror, analyzed the design of the brake unit size in the bimorph mirror and the influence of the mirror clamp support method on the deformation process.