In this paper, state-of-the-art laser thermal annealing is used to fabricate Ge diodes. We compared the effect of laser thermal annealing (LTA) and rapid thermal annealing (RTA) on dopant activation and electrical properties of phosphorus and Arsenic-doped n+/p junctions. Using LTA, high carrier concentration above 10 20 cm −3 was achieved in n-type doped regions, which enables low access resistance in Ge devices. Furthermore, the LTA process was optimized to achieve a diode I ON /I OFF ratio ∼10 5 and ideality factor (n) ∼1.2, as it allows excellent junction depth control when combined with optimized implant conditions. On the other hand, RTA revealed very high I ON /I OFF ratio ∼10 7 and n ∼1, at the cost of high dopant diffusion and lower carrier concentrations which would degrade scalability and access resistance. Index Terms-Ge, laser thermal annealing (LTA), leakage current, n+/p junction. I. INTRODUCTION I NDEED, many obstacles and challenges need to be addressed before Ge can become a forefront element in advanced CMOS technology. Realization of n-type ultrashallow junctions with highly activated dopants to maintain low Manuscript
The following dossier responds to the burgeoning interest in the area of academic creative practice that is expanding rapidly within the field of film and screen media, evidenced by the spate of practice-led and practice-based degrees being introduced in universities across the world. Increasingly, it seems that practitioners feel the need to acquire a more comprehensive understanding of film and screen media artworks through film theory while theoreticians aim to gain new, more profound perspectives on the creative process and the technical knowledge preceding the realisation of the finalised artworks. These new modes and intersections between theory and practice have produced an innovative and complex set of methods, expressions and approaches that are widening the scope of research in the area of film and media studies and blurring the traditional boundary between theory and practice. While these explorations complicate the formulation of precise, well-honed questions and adequate study methodologies, they also contribute to the production of a more vibrant and diversified research landscape.
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