High sensitivity micro-Hall sensors were fabricated using AlGaN∕GaN two-dimensional electron gas heterostructures grown by molecular beam epitaxy for high temperature operation. The room temperature electron mobility and sheet carrier concentration of the heterostructures were 850cm2∕Vs and 7.7×1012cm−2, respectively. The Hall voltage increased linearly with applied magnetic field up to 0.5T for all temperatures in the range of temperature from 20to600°C. A 100μm×100μm Hall device with a magnetic sensitivity of 0.35G∕(Hz)1∕2 at 600°C was used to measure the Curie temperature of NdFeB. The AlGaN∕GaN micro-Hall sensors will find a wide range of applications including high temperature scanning Hall microscopy, monitoring rotating parts in the engines of automobiles as well as space vehicles which are exposed to extreme changes in temperature and radiation.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.