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The Alx Ga1–xN layers with a wide range of AlN molar fraction (0 < x < 0.6) were grown by ammonia MBE on (0001)‐oriented sapphire substrates using silane as the silicon dopant. The structural, electrical and optical properties of the layers were investigated by atomic force microscopy, X‐ray diffraction, Hall, Raman, photoluminescence and cathodoluminescence measurements. It was found that doping affects surface morphology, dislocation density and luminescence intensity of the Alx Ga1–xN layers. A sharp decrease of the luminescence intensity for the heavily doped GaN and Al0.3Ga0.7N layers was explained by enhancement of the nonradiative recombination rate in degenerate GaN layers and by an increase in the defect concentration in AlGaN layers. (© 2013 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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