Fluorosilanes, chlorodiorganylboranes and chlorotrimethylstannane react with lithiated cyclotrisilazanes under LiF elimination and substitution. Mixed substituted compounds are obtained by the reaction of lithio-fluorosilyl-cyclotrisilazanes with other fluorosilanes. Ring coupling is achieved by the reaction of lithio-hexamethylcyclotrisilazane with 2-chloro-1,3,4,5,6-pentamethylborazine. The reaction of a fluoro(methylamino)silylsubstituted cyclotrisilazane with butyllithium leads to a system consisting of two hexamethyleyclotrisilazanes connected through a diazadisilacyclobutane ring.
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