This paper presents a large displacement out-of-plane Lorentz actuator array for surface manipulation. Actuators are formed from single crystal silicon flexible serpentine springs on either side of a rigid crossbar containing a narrow contact pillar. A rigid mounting rail system was employed to enable a 5 × 5 array, which offers scalability of the array size. Analytical and finite element models were used to optimize actuator design. Individual actuators were tested to show linear deflection response of ±150 µm motion, using a ±14.7 mA current in the presence of a 0.48 T magnetic field. This actuator array is suitable for various 2D surface modification applications due to its large deformation with low current and temperature of operation, and narrow contact area to a target surface.
A cytobot is an intracellular robotic micromanipulator, a microfabricated device small enough to be introduced into a cell. Control for a cytobot can be accomplished using three mutually perpendicular sequential magnetic control systems along with an electromechanical stepper microscope stage. Control depends on viscous damping within the cell. The design and fabrication techniques are dismsed and the processing techniques used in the fabrication of cytobots highlighted. Fabrication of a various magnetic cytobots are then illustrated namely. a chisel, a "circular" saw blade, a 'YLvhing" hook, a cuff for fibers, a box to confine an organelle, and an aspirator. and the firnctionality of these devices is explained. In order for the cytobot to get into the cell, it must be injected with a small needle, or since the majority of the structure is magnet, it could bejlred in ballisticly like a magnetic bullet. Once introduced into an embiyonic cell one can continuously manipulate one cell of the developing organism as cell division proceeds. We also d i m s the possibility of ma?iing such devices small enough to enter the cell nucleus, i.e.. karyobots.
A tri-electeode electrostatic actuator with one moving MEMS electrode and two stationary electrodes (tri-electrode actuator topology) is experimentally tested in this article. The stationary controlling (intermediate) electrode is perforated and below the moving MEMS electrode, while the common electrode is further below. Numerical simulations were performed to discover the optimal design parameters for a tri-electrode electrostatic actuator in comparison to a conventional two electrode electrostatic actuator. A silicon-based moving MEMS electrode was designed with a relatively linear spring constant, and the controlling intermediate and primary stationary electrodes were fabricated on either side of a quartz substrate instead of free space to simplify their fabrication. The measurement results showed that the tri-electrode topology can control the displacement of the MEMS with a lower controlling voltage and with extended controllable range before pull-in instability, compared to the conventional actuator. Simulations and measurements showed that the controlling voltage was reduced by 2.6 times compared to the conventional actuator design employing a bipolar driven intermediate electrode, while the controllable deflection range before pull-in was elevated by 33%. This tri-electrode design offers benefits for applications in need of arrays of electrostatic actuators such as deformable mirrors.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.