A low voltage and large stroke Lorentz force continuous deformable polymer mirror for wavefront control

Park, Byoungyoul; Afsharipour, Elnaz; Chrusch, D.D.; Shafai, Cyrus; Andersen, David R.; Burley, Greg

doi:10.1016/j.sna.2018.07.047

Cited by 13 publications

(10 citation statements)

References 10 publications

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“…Сегментированные ДЗ (рис. [21]. Деформируемые зеркала, изготовленные с использованием поликристаллического кремния, чрезвычайно легки и компактны [22], потребляют очень мало энергии и масштабируются до массивов в тысячи исполнительных механизмов [23].…”

Section: электростатические актюаторыunclassified

“…Это явление известно как состояние статического втягивания [25]. Следовательно, зазор между двумя пластинами должен быть достаточно большим, что увеличивает управляющее напряжение [21].…”

Section: электростатические актюаторыunclassified

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Адаптивная И Активная Рентгеновская Оптика

Лидер

2022

Оптика И Спектроскопия

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Описаны принципы работы и возможности рентгеновской адаптивной и активной оптики. Рассмотрены основные исполнительные механизмы изгиба зеркал полного внешнего отражения, используемых на источниках синхротронного излучения и в рентгеновских телескопах. Особое внимание уделено метрологии волнового фронта с использованием датчиков Шака-Гартмана, а также датчиков на основе решетчатых интерферометров, рентгеновских спеклов и птихографии. Ключевые слова: рентгеновские лучи, адаптивная оптика, активная оптика, биморфное зеркало, волновой фронт, метрология.

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Section: электростатические актюаторыunclassified

Адаптивная И Активная Рентгеновская Оптика

Лидер

2022

Оптика И Спектроскопия

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“…They give a smooth deformation because they have no gaps. However, the production of long deformable embedded piezo-mirrors is difficult, as they require long piezoelectric devices [21]. Deformable mirrors made using polycrystalline silicon are extremely light and compact [22], consume very little energy and scale to masses of thousands of actuators [23].…”

Section: Electrostatic Actuatorsmentioning

confidence: 99%

Adaptive and active X-ray optics

Лидер

2022

Optics and Spectroscopy

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This review describes the principles and capabilities of X-ray adaptive and active optics. The main executive mechanisms of bending mirrors used at synchrotron radiation sources and in X-ray telescopes are considered. Particular attention is paid to wavefront metrology using Shack-Hartmann sensors, as well as sensors based on grating interferometers, X-ray speckle and ptychography. Keywords: X-rays, adaptive optics, active optics, bimorph mirror, wavefront metrology.

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“…None of the above works has investigated the unique advantages of the spiral shape spring for electrostatic actuation for an out-of-plane electrostatic actuator. These actuators of this paper were designed for use with the polymer DM phase sheet mirror that was descibed in [21]. The phase sheet was a 12 mm × 12 mm Al/SU-8/Al membrane mirror.…”

Section: Design and Simulationsmentioning

confidence: 99%

“…The mirror is constructed from a 4 µm thick SU-8 film, that was coated on both sides by 250 nm thick thermally evaporated aluminum. In [21], an experimental verification was done to verify the shase sheet's spring constant. The 12 mm × 12 mm phase sheet was anchored on its sides, and an underlying MEMS a Lorentz force actuator was used to force a deformation at its centre.…”

Section: Design and Simulationsmentioning

confidence: 99%

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

Zhou

Shafai

Dietrich

2019

J. Micro/Nanolith. MEMS MOEMS

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A new electrostatic actuator for a double layer deformable mirror with continuous phase sheet is presented. The electrostatic actuator employs an upper electrode consisting of multiple Archimedean spiral spring arms supporting a small mass central attachment point, and is capable of separate the parameters of actuation voltage, spring constant, and resonance. The feature reduces the complexity in the designing of a double layer deformable mirror with continuous phase sheet that are widely employed in the adaptive optics area of astronomy. The fabricated device has a diameter of 1250 µm with 4 single crystal silicon spiral arms each having a length of 6030 µm, thickness of 15 µm, and width of 30 µm. The actuator was simulated and tested to have a resonant frequency above 2600 Hz, and was simulated to be capable of reaching approximately 5 µm displacement with a drive voltage of less than 30 V with an actuator-electrode separation of 15 µm, based on performance parameter found experimentally.

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A low voltage and large stroke Lorentz force continuous deformable polymer mirror for wavefront control

Cited by 13 publications

References 10 publications

Адаптивная И Активная Рентгеновская Оптика

Адаптивная И Активная Рентгеновская Оптика

Adaptive and active X-ray optics

Spiral spring electrostatic actuator for double-layer deformable mirror with continuous phase sheet

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