Laser-induced breakdown spectroscopy (LIBS) is an elemental analysis method thanks to minor sample preparation, rapid analysis, and a spatially resolved sensitivity down to trace level in any kind of sample matrix. State-of-the-art LIBS is operated in the optical spectral range (UV-Vis). Unfortunately, the application of LIBS in material detection is limited by the low precision and repeatability. This is particularly critical for inhomogeneous materials and alternative methods are desirable. Light elements such as Li, as well as F, are difficult to be characterized. The dual LIBS performance was initially studied in a simpler matrix such as LiF, radially collecting simultaneously the XUV and OES spectra from the same laser shot. For the case of LiF, XUV signals proved significantly more stable than in the case of LIBS-OES. The signal of F can be also seen clearly in the spectrum. Observation of the plasma emission at even shorter wavelengths in the extreme ultraviolet (wavelength range 5-20 nm) is supposed to improve the state-of-art limitations of LIBS.
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