The remarkable temporal properties of ultra-short pulsed lasers in combination with novel beam shaping concepts enable the development of completely new material processing strategies. We demonstrate the benefit of employing focus distributions being tailored in all three spatial dimensions. As example advanced Bessel-like beam profiles, 3D-beam splitting concepts and flat-top focus distributions are used to achieve high-quality and efficient results for cutting, welding and drilling applications. Spatial and temporal in situ diagnostics is employed to analyze light-matter interaction and, in combination with flexible digital-holographic beam shaping techniques, to find the optimal beam shape for the respective laser application.

The industrial maturity of ultrashort pulsed lasers has triggered the development of a plethora of material processing strategies. Recently, the combination of these remarkable temporal pulse properties with advanced structured light concepts has led to breakthroughs in the development of laser application methods, which will now gradually reach industrial environments. We review the efficient generation of customized focus distributions from the near-infrared down to the deep ultraviolet, e.g., based on nondiffracting beams and threedimensional-beam splitters, and demonstrate their impact for micro-and nanomachining of a wide range of materials. In the beam shaping concepts presented, special attention was paid to suitability for both high energies and high powers.

The homogenization of light is widely applied in various industrial sectors. The uniform high power processing of large areas requires a high degree of homogeneity. Sophisticated beam transformation techniques are used to optimize the illumination of standard optical diffusers such as microlens arrays and decrease the contrast of interference. Novel design techniques take advantage of a multimodal approach which is especially adapted to the characteristic properties of the laser light source. We show how anamorphic beam shaping is employed to transform the high power light source in order to meet the required level of homogeneity suited for the respective application.

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