“…The spatial properties, on the other hand, are determined by efficient and power-resistant concepts based on, e.g., diffractive-optical elements (DOEs), 16,17 free-form optical elements (ROEs), 16,18 or geometric phase holograms 19 (stationary or adaptive versions) illuminated single or multiple times. Together with the focusing unit (used NAs up to 0.5), 6 the beam shaping elements form the processing optics 6 usually fed with free-space or fiber-guided pulses, 20,21 see Fig. 1.…”