Transition edge sensors (TESs) have been developed to be used as high-resolution x-ray detectors. They show excellent energy resolution and can be used in many applications. TESs are a special kind of calorimeters that can determine small temperature changes after x-ray absorption. Such a temperature change causes a strong resistance change (superconducting to normal-conducting phase transition) that can be measured. The energy calibration of a TES based spectrometer is problematic due to the nonlinear behavior of the detector response. In this article, a method is introduced to calibrate the energy scale of TES spectra. This is accomplished by calculating the energy dependence of the response of the detector operated in electrothermal feedback mode. Using this method a calibration accuracy of a few eV for an x-ray energy of 6keV can be achieved. Examples of energy dispersive x-ray spectroscopy (EDS) measurements demonstrate the high quality of this method for everyday use of TES EDS detectors in material analysis. However, because the method relies only on a few very general assumptions, it should also be useful for other kinds of TES detectors.
Superconducting tunnel junctions (STJs) are a type of cryogenic detector with a working temperature of about 100 mK. They allow the combination of low energy threshold, high quantum efficiency and good count rate capability with an excellent energy resolution; at an x-ray energy of 5.9 keV an energy resolution of 10.8 eV (FWHM) has been achieved. The detector system described is based on STJs which consist of two superconducting Al electrodes separated by a thin dielectric tunnel barrier. The tunneling process of quasi-particles created by deposition of energy in the electrodes leads to a detectable current signal. The STJ is equipped with a superconducting Pb absorber which is read out via phonons. The Pb absorber increases absorption efficiency (∼50% at 6 keV) and suppresses detector artefacts. The degeneration of Pb, most probably due to oxidation, is overcome by the introduction of a protective SiO layer on top of the absorber. This layer leads to a slight reduction of energy resolution. Nevertheless, a resolution of 9.7 eV at 1.7 keV and of ∼20 eV at 5.9 keV could be realized with a prototype detector. Currently this STJ-based detector system is being incorporated into a prototype cryogenic spectrometer for XRF analysis.
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