Various metals in common use for shadow casting were evaporated in vacuo and their empirical evaporation efficiencies were compared with a weight method and with multiple-beam interferometry. A nomograph and appropriate correction factors were developed for rapid and accurate thin-film thickness predictions. Use of the evaporation formula to determine thickness gave values ranging from one-half to two times as much as those obtained by multiple-beam interferometry. Individual variations are believed due to alloying characteristics and physical properties of the evaporated film. A method is presented which enables thin-film thickness predictions with a high degree of accuracy for the materials used.
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