A Au nanomembrane is utilized as
a hydroxyl ion channel to develop
negative and positive-tone micro/nanolithography. Less than 50 nm
thick Au films, that is, Au nanomembranes, have nanopores through
which ions can pass. Micro- and nanostructures can be fabricated by
using an Au nanomembrane-deposited Al layer with KOH solution loading
on it. Hydroxyl ions diffuse over Au nanomembranes to react with an
underneath Al layer. Depending on the pH of the fabrication process,
which is governed by the volume of KOH solution loaded onto an Au
nanomembrane-deposited Al layer, protruded aluminum hydroxide structures
(positive tone lithography) or micro/nanotunnels (negative tone lithography)
are able to be obtained. A flexible THz photonic structure and microfluidic
channels have been demonstrated as possible applications of these
structures.
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