Sputtering rates of nickel, cobalt, titanium, and tungsten silicides for Ar + ions of 0.5-4 keV energy at a normal incidence were measured by a conventional method. Sputtering yields were calculated by approximating the atomic density of specimens from the bulk crystal structures. The sputtering yields were compared with those of pure elements in the silicides. It was found that a linear combination of the sputtering yield of each component agreed with the sputtering yields of the silicides except for tungsten silicide, in spite of the existence of preferential sputtering.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.