We have previously shown that macroscopic roughness spectra measured with light scattering at visible wavelengths were perfectly extrapolated at high spatial frequencies by microscopic roughness spectra measured with atomic force microscopy [Europhys. Lett. 22, 717 (1993); Proc. SPIE 2253, 614 (1994)]. These results have been confirmed by numerous experiments [Proc. SPIE 2253, 614 (1994)] and allow us today to characterize thin films microstructure from a macroscopic to a microscopic scale. In the first step the comparison of light scattering and atomic force microscopy is completed by optical measurements at UV wavelengths that allow us to superimpose (and no longer extrapolate) the spectra measured by the two techniques. In the second step we extract multiscale parameters that describe the action of thin-film coatings on substrate roughness in all bandwidths. The results obviously depend on materials and substrates and deposition techniques. Electron-beam evaporation, ion-assisted deposition, and ion plating are compared, and the conclusions are discussed in regard to the deposition parameters. Finally, special attention is given to the limits and performances of the two characterization techniques (light scattering and atomic force microscopy) that may be sensitive to different phenomena.

It is shown that using elliptically polarized light permits selecting well-defined subsurface volumes in a turbid medium. This suggests the possibility of probing biological tissues at specific depths. First, we present the method and preliminary results obtained on an Intralipid phantom. We next report on the method’s performance on a biological phantom (chicken breast) and, finally, on the exposed cortex of an anesthetized rat.

Accurate angular phase data are extracted from angle-resolved scattering measurements made with polarized light using a technique developed in the laboratory. This Ellipsometry of Angle-Resolved Scattering (E.A.R.S.) technique makes it possible to distinguish surface scattering from bulk scattering independent of the scattering levels for different types of samples. Phase data are also investigated in the speckle pattern.

Abstract. Polarization gating is a popular technique in biomedical optics. It is widely used to inspect the surface of the tissues (under colinear or cocircular detection) or instead to probe the volume (cross-linear detection), without information on the probed depth. Elliptical polarization is introduced to explore the possibility of probing diffuse tissues at selective depths. A thorough Monte Carlo simulation study shows complete correlation between the probed depths and the ellipticity of the polarized light, for a medium with known optical properties. Within a wide range of optical parameters, a linear relation between the backscattered intensity and the depth extension of the probed volume was found whatever the polarization used, but with a controlled extension depending on the ellipticity.

An interferential technique is described to eliminate polarized scattering from optical substrates and coatings. Conditions of annulment are respectively given for surface roughness and for bulk heterogeneity, at each direction of space. At low-level scattering, the method offers a complete discrimination of surface and bulk effects, whatever the micro-structural parameters. Arbitrary scattering levels can be treated in a similar way, but require the knowledge of microstructure.

A scatterometer is extended and allows us to perform ellipsometric measurements on scattered light in each direction of space. Experimental data are given for single thin-film layers and optical coatings and reveal unexpected results. The phenomena are investigated by means of the electromagnetic theories of surface and bulk scattering that emphasize the role of partial correlation and localized defects.

Partial polarization may be the result of a scattering process from a fully polarized incident beam. It is shown how the "loss of polarization" is connected with the nature of scatterers (surface roughness, bulk heterogeneity) and on the receiver solid angle. These effects are theoretically predicted and confirmed via multiscale polarization measurements in the speckle pattern of rough surfaces. "Full" polarization can be recovered when reducing the receiver aperture.

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