a b s t r a c tIn this work, the lack of adhesion occurred during the up-scaling of the deposition of tribological coatings in a semi-industrial apparatus is interpreted. The adhesion problems were detected for both hard and self-lubricant coatings from W-Ti-N and W:C systems, respectively, when they were deposited in a 4 cathodes TEER Ò chamber by reactive unbalanced magnetron sputtering. In spite of cleaning the substrates surface by ion bombardment prior to deposition, by establishing a discharge close to the substrate, insufficient adhesion critical load values were measured by scratch-testing. A powerful set of complementary techniques was used to the detailed analysis of the interfaces in order to understand and overcome the adhesion problems: RBS gave some insights on the nature of the problem by detecting composition anomalies in the substrate/coating interface; Auger spectroscopy was used for identifying the underneath chemical composition close to the interface; cross section TEM gave the final evidence of the presence of a contamination layer attributed to malfunctioning of the ion cleaning process, which was the cause of the lack of adhesion.
a b s t r a c tIn this paper, the influence of the addition of W and H to pure DLC coatings on the structural, mechanical and tribological properties will be presented. The coatings were deposited by r.f. magnetron sputtering from a C target embedded with different numbers of W pellets. Working in non-reactive or reactive atmosphere allowed to deposit H-free or H-containing coatings, respectively, on steel and Si substrates. A Cr adhesion interlayer was interposed between the films and the substrate. Films with W content from 0 to 12 at.% and H incorporated up to a maximum value close to 40 at.% were deposited. All coatings had an amorphous structure, although vestiges of crystallinity could be detected in W-containing films. The addition of W led to a significant hardening of the DLC coating (from w10 to 18 GPa); inversely, with H incorporation the hardness drop down to values even lower than that of pure DLC films. It was possible to establish a good correlation between the hardness and the residual stresses. In spite of decreasing friction and wear coefficients when alloying DLC with W, almost no difference was found among the W-DLC films whatever the W content was. A similar trend was achieved with the H addition. However, in this case a decrease in the friction coefficient was registered whereas the wear rate increased. The best performance concerning the friction was obtained for an H-containing coating (0.05) whereas, for the wear resistance, H-free W-DLC films were better performing (0.3 Â 10 À16 m 3 N À1 m À1 ).
In this paper, W-doped C-based coatings were deposited on steel and silicon substrates by RF magnetron sputtering, using W and C targets, varying the cathode power applied to the W target and the substrate bias. The chemical composition was varied by placing the substrates in a row facing the C and W targets. W content in the films increased from 1 to 2 at.% over the C target to ∼ 73 at.% over the W target. The coatings with W content lower than ∼12 at.% and ∼ 23 at.%, for biased and unbiased conditions, respectively, showed X-ray amorphous structures, although carbide nanocrystals must exist as shown by the detection of the WC 1−x phase in films with higher W content. C-rich films were very dense and developed a columnar morphology with increasing W content. An improvement in the hardness (from 10 GPa, up to 25 GPa) of the films was achieved either when negative substrate bias was used in the deposition, or when the WC 1−x phase was detected by X-ray diffraction. The adhesion of the coatings is very low with spontaneous spallation of those deposited with negative substrate bias higher than 45 V. Varieties in cathode power (90 W or 120 W) applied to the W target showed no observable influence on the characteristics of the films.
In this work, Si-doped DLC films were deposited on stainless steel (316SS) and polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.% SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30 GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the loading curve which was interpreted by finite element simulation and nanoscratching techniques.
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