Abstract:In this work, Si-doped DLC films were deposited on stainless steel (316SS) and
polycarbonate (PC) substrates by RF-PACVD in gas mixtures of SiH4+CH4, with 2, 5 and 10 vol.%
SiH4. The increase of the Si content in the films led to a progressive drop in the hardness from 30
GPa down to 23 GPa whereas the elastic modulus increased from 124 GPa up to 146 GPa, as
measured in the SS coated substrates. In the case of coated PC samples pop-in was observed in the
loading curve which was interpreted by finite element si… Show more
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