We have studied structural changes that occur during annealing of GaInNAs/GaAs multiple quantum wells grown by metalorganic vapor-phase epitaxy (MOVPE). Different thermal treatments led to an improved room-temperature photoluminescence (PL) intensity, but also to room-temperature PL peak splitting. This splitting is related to the appearance of compositional clustering as displayed by transmission electron microscopy (TEM). In addition to this, interfacial layers on each side of the wells have also been observed by TEM and their composition is discussed on the basis of high resolution x-ray diffraction studies. It is suggested that the interface layers are indium deficient, but enriched in nitrogen, degrading the optical quantum well performance and indicating a need for improved switching sequences in the MOVPE growth.
A route towards optimisation of uniformity and density of InAs/(InGaAs)/GaAs quantum dots grown by metal organic vapor phase epitaxy (MOVPE) through successive variations of the growth parameters is reported. It is demonstrated that a key parameter in obtaining a high density of quantum dots is the V/III ratio, a fact which was shown to be valid when either AsH 3 (arsine) or tertiary-butyl-arsine (TBA) were used as group V precursors. Once the optimum V/III ratio was found, the size distribution was further improved by adjusting the nominal thickness of deposited InAs material, resulting in an optimum thickness of 1.8 monolayers of InAs in our case. The number of coalesced dots was minimised by adjusting the growth interruption time to approximately 30 s. Further, the uniformity was improved by increasing the growth temperature from 485 °C to 520 °C. By combining these optimised parameters, i.e. a growth temperature of 520 °C, 1.8 monolayers InAs thickness, 30 s growth stop time and TBA as group V precursor, a full-width-half-maximum (FWHM) of the low temperature luminescence band of 40 meV was achieved, indicating a narrow dot size distribution.
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