We report for the first time experimental investigations on SOI, Si 1-x Ge x OI & GeOI Tunnel FET (TFET). These devices were fabricated using a Fully Depleted SOI CMOS process flow with high k-metal gate stack, enabling 2 decades lower I OFF (~30fA/µm) compared to co-processed CMOS. We successfully solve the TFET bipolar parasitic conduction by a novel TFET architecture, the Drift Tunnel FET (DTFET), with improved OFF state control. Concerning the ON current issue, we improve the SOI p (resp. n) TFET
We report on vertically stacked horizontal Si NanoWires (NW) p-MOSFETs fabricated with a replacement metal gate (RMG) process. For the first time, stacked-NWs transistors are integrated with inner spacers and SiGe sourcedrain (S/D) stressors. Recessed and epitaxially re-grown SiGe(B) S/D junctions are shown to be efficient to inject strain into Si p-channels. The Precession Electron Diffraction (PED) technique, with a nm-scale precision, is used to quantify the deformation and provide useful information about strain fields at different stages of the fabrication process. Finally, a significant compressive strain and excellent short-channel characteristics are demonstrated in stacked-NWs p-FETs.
Physical-gap-channel graphene field effect transistor with high on/off current ratio for digital logic applications Appl. Phys. Lett. 101, 143102 (2012) Short channel mobility analysis of SiGe nanowire p-type field effect transistors: Origins of the strain induced performance improvement Appl. Phys. Lett. 101, 143502 (2012) Terahetz detection by heterostructed InAs/InSb nanowire based field effect transistors Development of high-performance fully depleted silicon-on-insulator based extended-gate field-effect transistor using the parasitic bipolar junction transistor effect Appl. Phys. Lett. 101, 133703 (2012) Abnormal interface state generation under positive bias stress in TiN/HfO2 p-channel metal-oxide-semiconductor field effect transistors
In this work, we report experimental results on the use of tunnel field-effect transistors as capacitorless dynamic random access memory cells, implemented as double-gate fully depleted silicon-on-insulator devices. The devices have an asymmetric design, with a partial overlap of the top gate (LG) and with a total overlap of the back gate over the channel region (LG + LIN). A potential well is created by biasing the back gate (VBG) in accumulation, while the front gate (VFG) is in inversion. Holes from the p+ source are injected by the forward-biased p+ i junction and stored in the electrically induced potential well.
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