A new contactless device internal test technique is introduced based on a scanning force microscope enabling dynamic voltage contrast within passivated integrated circuits. A spatial resolution below 500 nm and voltage resolution down to voltages of 0.2 V amplitude are achieved. For the first time static voltage contrast obtained with the scanning force microscope is shown on passivated integrated circuits. Potential and limits of this test technique are discussed.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.